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上海德倫氣體設(shè)備有限公司

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      • 產(chǎn)品說明
        GENTEC U57 series single-stage regulators are a springless, threadless, point-of-use tied diaphragm design for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

        FEATURES
        • 316L and Hastelloy® body
        • Metal to metal diaphragm to body seal
        • Easy front panel and rear bracket mounting
        • Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
        • No springs or threads are exposed to the wetted area
        • Standard fully internal electropolished
        • Designed for very low particle generation
        • Cleaned, assembled and packaged for high purity semiconductor applications
        • High-cycle life
        • 100% Helium-leak tested

        MATERIALS OF CONSTRUCTION
        • Wetted
        • Body： 316L stainless steel, Hastelloy®
        • Seat： PCTFE
        • Diaphragm： Elgiloy®, Hastelloy®
        • Poppet： 316 stainless steel, Hastelloy®
        • Compression Member： 316 stainless steel, Hastelloy®
        • Remaining Part： 316 stainless steel, Hastelloy®

          Non-wetted
        • Nut： 316 stainless steel
        • Cap： nickel plated brass
        • Knob： ABS Plastic

          Operating Conditions
        • Maximum Inlet Pressure： 300 psig (20 barg)
        • Outlet Pressure： 0-30 psig (2 barg)
        • Temperature： 0°F to 140°F (-18°C to 60°C)

          Functional Performance
        • Flow Capacity： Cv=0.054
        • Maximum Leak Rate:
          　　Inboard Leakage： 0.5 x 10-9 atm cc/sec He
          　　Outboard Leakage： 1.0 x 10-9 atm cc/sec He
          　　Across Seat Leakage： 1.0 x 10-9 atm cc/sec He
        • Proof Pressure： 150% of maximum rated pressure
        • Burst Pressure： 400% of maximum rated pressure

          Surface Finish
        • Standard Ra (EP)： 10 μin
        • Optional Ra (EP)： 5 μin

          Internal Volume
          　　9.3 cc
        型號參數(shù)：
        SeriesBodyPortsSeatInlet PressureOutlet PressureGaugeInlet/Outlet ConnectionsOptions
        U57SL: 316LA: 2 portK: PCTFEG: 300psigL: 0-30psigP: with gauge91: FSR(1/4"F)E: 5 μin
         H: Hastelloy®B: 3 port   W: without gauge92: FSR(1/4"M)I: Internal 1/4" FSR(F) gauge ports
          G: 4 port    41: 1/4" tube weld stubT: Trim Hastelloy® internal
          J: 4 port      
    上海德倫氣體設(shè)備有限公司

    鄭溪松/張宇

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